Title:
DRYING UNIT, DRYING DEVICE, AND FILM FORMING SYSTEM
Document Type and Number:
Japanese Patent JP2014184364
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a drying unit, a drying device, and a film forming system which hardly develop wrinkly defects even when a flexible substrate having a coated region and an uncoated region formed thereon is subjected to drying treatment.SOLUTION: The present system comprises a lower roller 45 that flattens a coated region of a substrate FS by supporting the substrate FS from below at a position adjacent to the conveyance upstream side of a transportation roller 24c arranged on the conveyance downstream side of the drying treatment part 42. Therefore, even when the substrate FS temporarily develops local warping due to the drying treatment from the result that a surface S1 of the substrate FS has a coated region and an uncoated region formed thereon, the coated region of the substrate FS is flattened by the lower roller 45, and therefore the warping in the uncoated region of the substrate FS continuous to the coated region is spatially dispersed. The local warping can be prevented from being concentrated as is and coming into contact with the transportation roller 24c, so that the occurrence of wrinkly defects is suppressed.
More Like This:
Inventors:
RIKUI HIDEAKI
MATSUDA KUNITOSHI
YAMAKOSHI JUNICHI
MATSUDA KUNITOSHI
YAMAKOSHI JUNICHI
Application Number:
JP2013059392A
Publication Date:
October 02, 2014
Filing Date:
March 22, 2013
Export Citation:
Assignee:
DAINIPPON SCREEN MFG
International Classes:
B05C9/14; B05C13/02; F26B13/04; F26B25/20; H01M4/139
Attorney, Agent or Firm:
Hidetoshi Yoshitake
Takahiro Arita
Takahiro Arita
Previous Patent: APPARATUS AND METHOD FOR REMOVING PRECIPITATION OF DISSOLVED SUBSTANCE
Next Patent: METHOD FOR PREVENTING SCALE, AND SCALE PREVENTIVE
Next Patent: METHOD FOR PREVENTING SCALE, AND SCALE PREVENTIVE