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Patent Searching and Data


Title:
DUAL MULTIBLADE CUTTING SAW
Document Type and Number:
Japanese Patent JPH09207124
Kind Code:
A
Abstract:

To economically cut a rectangular chip with high efficiency by making it possible not only to move two spindles independently in a Z-axis direction but also to move them at the same time in a Y-axis direction by one drive source in a cutting saw.

At first, an article W to be processed such as a green ceramics condenser substrate is fixed on a holding table 5 and the holding table 5 is moved by an X-axis moving table 3 to be positioned to an alignment microscope 17 to perform the alignment of a street S1 in a lateral direction. Subsequently, a first multiblade 14 is lowered in a Z-axis direction by definite quantity while the holding table 5 is moved in an X-axis direction to simultaneously cut the street S1. After cutting, the holding table 5 is stopped at a P-position and rotated around a vertical axis by 90° to position a street S2 in a vertical direction in parallel to an X-axis and a second multiblade 16 is lowered in the Z-axis direction by definite quantity while the holding table 5 is again moved in the X-axis direction to simultaneously cut the street S2.


Inventors:
TAKIZAWA AKIRA
Application Number:
JP3580996A
Publication Date:
August 12, 1997
Filing Date:
January 31, 1996
Export Citation:
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Assignee:
DEISUKO ENG SERVICE KK
International Classes:
B28D5/02; H01L21/301; (IPC1-7): B28D5/02; H01L21/301
Attorney, Agent or Firm:
Akimoto Teruo