Title:
デュアル物理量センサ
Document Type and Number:
Japanese Patent JP5548531
Kind Code:
B2
Abstract:
A pressure sensor for detecting a pressure of a first object to be measured; a pressure sensor for detecting a pressure of a second object to be measured; a temperature sensor for detecting the temperature of the pressure sensor and the pressure sensor; a first correcting portion for executing a correction that eliminates a fluctuation portion, due to a change in temperature, from the detection signal of the pressure sensor, and for outputting the signal, after the correction, as a measurement signal for the first object to be measured; and a second correcting portion for executing a correction that eliminates a fluctuation portion, due to a change in temperature, from the detection signal of the pressure sensor, and for outputting the signal, after the correction, as a measurement signal for the second object to be measured; wherein the temperature sensor is integrated with the pressure sensor and the pressure sensor so as to be in a state of mutual contact.
Inventors:
Akio Kasai
Application Number:
JP2010138333A
Publication Date:
July 16, 2014
Filing Date:
June 17, 2010
Export Citation:
Assignee:
アズビル, Inc.
International Classes:
G01L13/06; G01F1/34; G01L19/04
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Toshifumi Onuki
Akihiko Eguchi
Kazuhiko Naito
Previous Patent: JPS5548530
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