Title:
DUST COLLECTOR
Document Type and Number:
Japanese Patent JP2518528
Kind Code:
B
Abstract:
PURPOSE: To attract dust from vicinal space to prevent re-contamination and to adsorb and remove dust from an object from which dust must be removed. regardless of the polarity possessed by the dust.
CONSTITUTION: A large number of positive charge members 2 and a large number of negative charge members 3 are provided on the same surface of a plate member 1 and this plate member 1 is allowed to approach a surface from which dust must be removed within a distance on which an electric field generated by charge is exerted to attract and adsorb the dust bonded to the surface from which dust must be removed. The distance receiving the effect of an electric effect and the intensity of the electric field can arbitrarily be controlled by the size of charge members and the number of them.
Inventors:
Takaoka, Hajime
Application Number:
JP1993000184551
Publication Date:
May 17, 1996
Filing Date:
July 27, 1993
Export Citation:
Assignee:
NEC CORP
International Classes:
B03C7/02; G03F1/14; H01L21/027; B03C7/00; G03F1/14; H01L21/02; (IPC1-7): B03C7/02; H01L21/027
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