To provide a relatively simply-constituted dust removal/sterilization device effectively removing dust, microorganism, bacteria or the like adhering to various kinds of objects to be treated entering a clean room.
The dust removal/sterilization device 1 performing dust removal and sterile filtration with respect to the object to be treated entering the clean room includes: an air shower booth 3 provided with an air injection means for injecting air; a spray chamber 5 which is provided with a spray means for spraying a sterilization solution, and into which the object to be treated which has passed through the air shower booth 3 enters; and a control unit 7 for driving the air injection means to inject air to the object to be treated and also driving the spray means to spray the sterilization solution into the spray chamber 5 when the object to be treated is positioned in the air shower booth 3.
Moriaki Ogawa
Kunio Araki