Title:
DUST-DISCHARGE PREVENTIVE DEVICE OF ROBOT FOR CLEAN ROOM
Document Type and Number:
Japanese Patent JPS62228394
Kind Code:
A
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Inventors:
YAMAGATA ICHIRO
Application Number:
JP6866986A
Publication Date:
October 07, 1987
Filing Date:
March 28, 1986
Export Citation:
Assignee:
TOSHIBA CORP
International Classes:
B25J19/00; (IPC1-7): B25J19/00
Attorney, Agent or Firm:
Noriyuki Noriyuki