Title:
DUST MEASUREMENT DEVICE, DUST MEASUREMENT METHOD AND FILM FORMING METHOD
Document Type and Number:
Japanese Patent JPH08327528
Kind Code:
A
Abstract:
PURPOSE: To make the adhesion state of dust to be measured on a substrate proper, and allow instantaneous (real time) measurements or the continuity of measurements, regarding a dust measurement device for measuring the number of dust particles adhering to the surface of a substrate.
CONSTITUTION: This device features that a measuring substrate 1 for keeping dust 2 deposited on the surface thereof is made of a light transmission material, and a dust measurement means 3 for measuring the dust 2 is laid on the rear side of the substrate 1 (that is, the side of the substrate 1 opposite to the side for keeping the dust 2 deposited). Furthermore, the dust measurement method and the film forming method feature the use of the device.
Inventors:
HASEGAWA TADASHI
OKAMOTO KENJI
OKAMOTO KENJI
Application Number:
JP13155795A
Publication Date:
December 13, 1996
Filing Date:
May 30, 1995
Export Citation:
Assignee:
FUJITSU LTD
International Classes:
G01N15/02; C23C14/00; G01N15/06; H01L21/203; H01L21/205; H01L21/66; (IPC1-7): G01N15/06; C23C14/00; G01N15/02; H01L21/203; H01L21/205; H01L21/66
Attorney, Agent or Firm:
Teiichi
Previous Patent: CAPILLARY TYPE VISCOMETER
Next Patent: OPTICAL INSPECTION EQUIPMENT FOR FLUID, ESPECIALLY EQUIPMENT FOR HEMATOLOGICAL ANALYSIS
Next Patent: OPTICAL INSPECTION EQUIPMENT FOR FLUID, ESPECIALLY EQUIPMENT FOR HEMATOLOGICAL ANALYSIS