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Title:
DUST-PROOF PERFORMANCE INSPECTION METHOD OF LIGHT-RECEIVING ELEMENT, AND MANUFACTURING METHOD OF LIGHT-RECEIVING ELEMENT USING IT
Document Type and Number:
Japanese Patent JP2008026119
Kind Code:
A
Abstract:

To provide a dust-proof performance inspection method of a light-receiving element for inspecting dust-proof performance of the light-receiving element to dust existing in an environment used actually, and a manufacturing method of the light-receiving element using it, concerning the dust-proof performance inspection method of the light-receiving element for inspecting the dust-proof performance of the light-receiving element to dust existing in the environment used actually, and the manufacturing method of the light-receiving element using it.

Liquid 23 wherein many grains of powder 25 are intermingled is dropped onto the light-receiving surface 2 upside of the light-receiving element 1, and the light-receiving surface 2 upside is dried, to thereby allow the powder 25 to remain on the light-receiving surface 2 upside, and the dust-proof performance of the light-receiving element 1 is inspected based on a residual amount of the powder 25 on the light-receiving surface 2 upside.


Inventors:
ONO JUN
Application Number:
JP2006198269A
Publication Date:
February 07, 2008
Filing Date:
July 20, 2006
Export Citation:
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Assignee:
TDK CORP
International Classes:
G01J1/00; G01M11/00; H01L31/10; G01N17/00
Attorney, Agent or Firm:
Masaki Morioka