To provide a dust-proof performance inspection method of a light-receiving element for inspecting dust-proof performance of the light-receiving element to dust existing in an environment used actually, and a manufacturing method of the light-receiving element using it, concerning the dust-proof performance inspection method of the light-receiving element for inspecting the dust-proof performance of the light-receiving element to dust existing in the environment used actually, and the manufacturing method of the light-receiving element using it.
Liquid 23 wherein many grains of powder 25 are intermingled is dropped onto the light-receiving surface 2 upside of the light-receiving element 1, and the light-receiving surface 2 upside is dried, to thereby allow the powder 25 to remain on the light-receiving surface 2 upside, and the dust-proof performance of the light-receiving element 1 is inspected based on a residual amount of the powder 25 on the light-receiving surface 2 upside.
WO/2022/176439 | PHOTOELECTRIC SENSOR |
JP2015210223 | INSPECTION METHOD OF OPTICAL SENSOR DEVICE AND THE OPTICAL SENSOR DEVICE |
JPH04204124 | OPTICAL ENERGY METER |