Title:
ダスト除去装置
Document Type and Number:
Japanese Patent JP4611900
Kind Code:
B2
Abstract:
A dust remover includes a rotary brush which removes dust attached to a workpiece, a workpiece carrying section which carries the workpiece in a direction crossing the axial direction of the rotary brush, a brush rotating section which rotates the rotary brush around the axial center of the rotary brush, and a brush back-and-forth movement section which moves the rotary brush back and forth in the axial direction of the rotary brush. The dust remover also includes a motor which is a common driving source for both the brush rotating section and the brush back-and-forth movement section. The brush rotating section has a power transmitting section which transmits the power of the motor to the rotary brush as a rotation of the rotary brush, and the brush back-and-forth movement section has a power transmitting section which converts the power of the motor into a back-and-forth movement of the rotary brush to transmit the back-and-forth movement to the rotary brush.
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Inventors:
Atsushi Nakata
Jun Oyama
Jun Oyama
Application Number:
JP2006005363A
Publication Date:
January 12, 2011
Filing Date:
January 12, 2006
Export Citation:
Assignee:
Knicks Inc.
International Classes:
H01L21/304; B08B1/02; B08B1/04
Domestic Patent References:
| JP2005211722A | ||||
| JP2002283165A |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Katsuro Tanaka
Shinji Oga
Katsuro Tanaka
Shinji Oga