Title:
DUST REMOVAL SYSTEM AND AIR SUPPLY SYSTEM
Document Type and Number:
Japanese Patent JP2022089232
Kind Code:
A
Abstract:
To provide a dust removal system which can utilize static elimination with a soft X-ray to remove dust on an object surface without providing a facility for shielding the soft X-ray.SOLUTION: A dust removal system includes: a dust removal head 10 having an air injection chamber 170, which is supplied with air through an air supply pipe 22 and discharges air from an air discharge port 173 to a surface of an object W from which dust is removed, and an air suction chamber 110 which suctions the air on the surface of the object W through air suction ports 112a, 112b; and a soft X-ray radiation device 18 which radiates a soft X-ray to ionize air in the air injection chamber 170.SELECTED DRAWING: Figure 4
Inventors:
ITO TAKAHIRO
IRIE FUMITAKA
IRIE FUMITAKA
Application Number:
JP2020201445A
Publication Date:
June 16, 2022
Filing Date:
December 04, 2020
Export Citation:
Assignee:
HUGLE KAIHATSU KK
International Classes:
B08B5/00; G21K5/02; H05F3/06
Attorney, Agent or Firm:
Masaki Higuchi
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