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Title:
DYNAMIC QUANTITY SENSOR, ELECTRONIC EQUIPMENT, AND METHOD OF MANUFACTURING PHYSICAL QUANTITY SENSOR
Document Type and Number:
Japanese Patent JP2007047069
Kind Code:
A
Abstract:

To provide a physical quantity sensor that can seal a closed chamber for storing a detection section in a high vacuum state, can reduce size and costs, can improve the degree of freedom in a device, and has no restriction by the influence of heat; and to provide electronic equipment and a method of manufacturing the physical quantity sensor.

The physical quantity sensor comprises the closed chamber maintained in a vacuum state, a movable section stored in the closed chamber, and the detection section for detecting dynamic quantity operated from the outside. The method of manufacturing the physical quantity sensor includes an evacuation process for evacuating the inside of the closed chamber from a through hole provided at one portion in the closed chamber, and a vacuum sealing process for blocking the through hole. In the evacuation process and/or the vacuum sealing process, the degree of vacuum in the closed chamber is monitored.


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Inventors:
OKA KAZUNARI
MITSUSUE RYUTA
TAKAHASHI HIROSHI
Application Number:
JP2005233183A
Publication Date:
February 22, 2007
Filing Date:
August 11, 2005
Export Citation:
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Assignee:
SEIKO INSTR INC
International Classes:
G01C19/56; G01L21/22; G01P15/08; H01L29/84
Attorney, Agent or Firm:
Yoshiharu Matsushita