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Title:
DYNAMIC SHAPE MEASURING METHOD AND DYNAMIC SHAPE MEASURING DEVICE
Document Type and Number:
Japanese Patent JP2007240344
Kind Code:
A
Abstract:

To largely shorten the measurement time for acquiring height data at a plurality of times required for displaying moving image display of an MEMS (Micro Electro Mechanical System) operation.

A stroboscopic phase shift interference device sets optical path difference, measures the height of the MEMS under operation at a plurality of phases at three or more points with respect to the set optical path difference, calculates an estimation equation of height locus of the MEMS under operation, and determines the shape of the MEMS under operation by calculation.

COPYRIGHT: (C)2007,JPO&INPIT


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Inventors:
TAKAHASHI FUMIYUKI
FUSE TAKASHI
TSUKAHARA HIROYUKI
Application Number:
JP2006063685A
Publication Date:
September 20, 2007
Filing Date:
March 09, 2006
Export Citation:
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Assignee:
FUJITSU LTD
International Classes:
G01B11/24; G01B11/02
Domestic Patent References:
JP2003222508A2003-08-08
JP2004116997A2004-04-15
JP2004077223A2004-03-11
JP2005326316A2005-11-24
JP2004347426A2004-12-09
JPH0719818A1995-01-20
JP2001296347A2001-10-26
JP2004167109A2004-06-17
JP2002196384A2002-07-12
Attorney, Agent or Firm:
Junichi Yokoyama



 
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