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Title:
DYNAMIC VIBRATION ABSORBER AND STAGE DEVICE
Document Type and Number:
Japanese Patent JP2007120614
Kind Code:
A
Abstract:

To absorb vibrational components in two directions.

A dynamic vibration absorber 30 comprises: a mounting base 32 attached to a Y table 24; an X-direction weight 34 slidably placed on the mounting base 32; a Y-direction weight 36 intersected with and opposed to the X-direction weight 34 mounted slidably in a Y direction; and struts 38 standing on the mounting base 32. The dynamic vibration absorber 30 further comprises: X-direction spring members 40 connecting side faces of the struts 38 and the X-direction weight 34; and Y-direction spring members 42 connecting the side faces of the struts 38 and the Y-direction weight 36. Each of the spring members 40, 42 is constituted of a plate spring, and its spring constant is adjusted by a spring force adjusting mechanism 50 which changes fixing positions of the struts 38. The spring members 40, 42 are deflected depending on the relative displacement of the weight 34, 36 with respect to the struts 38 to give spring forces to the weights 34, 36 according to deflection so as to make a reaction force of the spring force act on the strut 38.


Inventors:
SHIBUKAWA TAKASHI
Application Number:
JP2005313220A
Publication Date:
May 17, 2007
Filing Date:
October 27, 2005
Export Citation:
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Assignee:
SUMITOMO HEAVY INDUSTRIES
International Classes:
F16F15/02; H01L21/027
Attorney, Agent or Firm:
Tadahiko Ito