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Title:
DYNAMICAL AMOUNT DETECTION ELEMENT, AND DYNAMICAL AMOUNT DETECTOR
Document Type and Number:
Japanese Patent JP2007108072
Kind Code:
A
Abstract:

To provide a dynamical amount detection element for improving detection accuracy of displacement of an oscillator, and a dynamical amount detector having the dynamical amount detection element.

The dynamical amount detection element comprises mainframes 30-1 and 30-2 supported displaceably in the X-axis direction parallel to a substrate 10 surface with respect to a substrate 10, the oscillator 20 supported displaceably in the Y-axis direction parallel to the substrate 10 surface with respect to the mainframes 30-1 and 30-2 and rectangularly to the X-axis direction, and driving electrode sections that are disposed in the mainframes 30-1 and 30-2 and drive the mainframes 30-1 and 30-2 in the X-axis direction. Terminal ends 32-1 to 32-4 are formed by extending the ends of the mainframes 30-1 and 30-2 in the Y-axis direction, and the driving electrode sections 51-1 to 51-8 are arranged on both sides of the terminal ends 32-1 to 32-4 in the X-axis direction.


Inventors:
SENDA HIDEMI
Application Number:
JP2005300568A
Publication Date:
April 26, 2007
Filing Date:
October 14, 2005
Export Citation:
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Assignee:
TOYOTA MOTOR CORP
International Classes:
G01C19/56; G01C19/5747; G01C19/5762
Domestic Patent References:
JP2001116553A2001-04-27
JP2004012469A2004-01-15
JP2000009475A2000-01-14
Attorney, Agent or Firm:
Tadahiko Ito