Title:
DYNAMICAL AMOUNT SENSOR AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3293606
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a dynamical amount sensor having a novel structure.
SOLUTION: Fixed parts 2, 3, 4 and 5 are provided so as to stand on a base 1 and L-shaped beams 6, 7, 8 and 9 extend from these fixed parts 2, 3, 4 and 5. A square weight 10 is connected to and supported by the other ends of the beams 6, 7, 8 and 9. A plane formed by these L-shaped beams 6, 7, 8 and 9 is a movable plane of the weight 10. Bar-shaped electrodes 11, 12, 13 and 14 are formed on four sides of the weight 10. On the base 1, besides, bar- shaped electrodes 15, 16, 17 and 18 are disposed between the electrodes 11, 12, 13 and 14 so that they are opposed to these electrodes. The weight 10 is excited by the impression of voltage on the opposite electrodes 13 and 17, and 14 and 18, while the movement of the weight 10 consequent upon the impression of a rotational angular velocity Ω is detected by the opposite electrodes 11 and 15, and 12 and 16.
Inventors:
Masato Mizukoshi
Application Number:
JP28403999A
Publication Date:
June 17, 2002
Filing Date:
October 13, 1992
Export Citation:
Assignee:
株式会社デンソー
International Classes:
G01C19/56; G01C19/5755; G01C19/5769; G01P15/125; G01P15/18; H01L29/84; (IPC1-7): G01C19/56; G01P9/04; G01P15/125; H01L29/84
Domestic Patent References:
| JP4232875A | ||||
| JP4256864A | ||||
| JP62232171A | ||||
| JP4242114A | ||||
| JP61114123A | ||||
| JP63154915A | ||||
| JP6293668A | ||||
| JP61139719A | ||||
| JP48972U |
Other References:
【文献】国際公開92/1941(WO,A1)
Attorney, Agent or Firm:
Hirohiko Usui