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Document Type and Number:
Japanese Patent JP3512004
Kind Code:

PROBLEM TO BE SOLVED: To enhance the accuracy of detecting angular velocity by causing vibrators to stably vibrate with a large amplitude in a first direction in the case of a dynamical quantity detector for detecting angular velocity by detecting the vibration of the vibrators in a second direction normal to the first direction with the vibrators kept vibrating in the first direction.
SOLUTION: The vibrators 20-1 and 20-1 are supported displaceably in the Y-axis direction on main frames 30-1 to 30-4 via beams 31a to 31d for detection. The main frames 30-1 to 30-4 are supported displaceably in the X-axis direction on a substrate 10 via beams 33a to 33d and 34a to 34d for driving. The main frames 30-1 and 30-3 are connected to each other by link beams 41a and 41c, and a link 42a while the main frames 30-2 and 30-4 are connected to each other by link beams 41c and 41d, and a link 42b. The links 42a and 42b are connected to each other by sub-link beams 43a to 43d and sub-links 44a and 44b.

Hashimoto, Masahito
Application Number:
Publication Date:
March 29, 2004
Filing Date:
December 20, 2000
Export Citation:
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International Classes:
G01C19/56; G01C19/5726; G01C19/5747; H01L29/84; (IPC1-7): G01C19/56; G01P9/04; H01L29/84
Other References:
Byeung−Leul Lee,A Novel Resonant Accelerometer; Variable Electrostatic Stiffeness Type,Transducers’99,日本,1999年 6月,P.1546−P.1549
Kei Ishihara ,An Inertial Sensor Technology using DRIE and Wafer Bonding with Enhanced Interconnect Capability,Transducers’99,日本,1999年 6月,P.254−P.257
Ki Bang Lee,Frequency Tuning of a Laterally Driven Microresonator Using an Electrostatic Comb Array of Linearly ,Transducers’97,米国,1997年 6月,P.113−P.116,Varied Length(タイトル続き)
Kun Wang,Frequency Trimming and Q−Factor Enhancement of Micromechanical Resonators Via Localized Filament ...,Transducers’97,米国,1997年 6月,P.109−P.112,Annealing(タイトル続き)
Zhihong Li,A Bulk Micromachined Vibratory Lateral Gyroscope Fabricated with Wafer Bonding and Deep Trench Etc..,Traansducers’99,日本,1999年 6月,P.1594−P.1597,Etching(タイトル続き)
Attorney, Agent or Firm:
大庭 咲夫 (外1名)