Title:
電子ビーム生成および測定
Document Type and Number:
Japanese Patent JP7241746
Kind Code:
B2
Abstract:
A flat top laser beam is used to generate an electron beam with a photocathode that can include an alkali halide. The flat top profile can be generated using an optical array. The laser beam can be split into multiple laser beams or beamlets, each of which can have the flat top profile. A phosphor screen can be imaged to determine space charge effects or electron energy of the electron beam.
Inventors:
Iokay Midi Caterina
Delgado Gildaldo
Hill Francis
Garcia Rudy
Romero Mike
Delgado Gildaldo
Hill Francis
Garcia Rudy
Romero Mike
Application Number:
JP2020519300A
Publication Date:
March 17, 2023
Filing Date:
October 05, 2018
Export Citation:
Assignee:
KLA Corporation
International Classes:
H01J37/073; G01N23/2251; H01J1/34; H01J40/06; H01L21/66
Domestic Patent References:
| JP2017126428A | ||||
| JP5121021A | ||||
| JP2012221678A | ||||
| JP2001509967A |
Foreign References:
| US20050274911 |
Attorney, Agent or Firm:
Patent Attorney Corporation YKI International Patent Office
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