Title:
弾性波装置
Document Type and Number:
Japanese Patent JP7103528
Kind Code:
B2
Abstract:
An acoustic wave device includes a piezoelectric layer and first and second electrodes. The first and second electrodes face each other in a direction intersecting with a thickness direction of the piezoelectric layer. The acoustic wave device uses a bulk wave of a thickness-shear primary mode. A material of the piezoelectric layer is lithium niobate or lithium tantalate. The piezoelectric layer is on a first main surface of the silicon substrate. The acoustic wave device further includes a trap region on a side of a second main surface of the piezoelectric layer.
Inventors:
Takeshi Yamane
Kimura Tetsuya
Sho Nagatomo
Katsuya Daimon
Hideki Iwamoto
Kimura Tetsuya
Sho Nagatomo
Katsuya Daimon
Hideki Iwamoto
Application Number:
JP2021548451A
Publication Date:
July 20, 2022
Filing Date:
September 25, 2020
Export Citation:
Assignee:
MURATA MANUFACTURING CO.,LTD.
International Classes:
H03H9/25; H03H9/145
Domestic Patent References:
| JP2013528996A | ||||
| JP201962441A | ||||
| JP2018534863A |
Foreign References:
| WO2016098526A1 | ||||
| US20170085247 |
Attorney, Agent or Firm:
Patent business corporation Hokuto patent office