Title:
ELECTORON BEAM DEVICE
Document Type and Number:
Japanese Patent JPS5365652
Kind Code:
A
Abstract:
PURPOSE: To obtain freely a pure dispersion electron beam image, pure carried luminescence image or a mixture image of them, by driving the electron shielding plate located between the test sample and a semiconductor detector.
Inventors:
ANDOU ICHIROU
Application Number:
JP14141476A
Publication Date:
June 12, 1978
Filing Date:
November 25, 1976
Export Citation:
Assignee:
NIPPON ELECTRON OPTICS LAB
International Classes:
H01J37/244; H01J37/29; (IPC1-7): H01J37/29