Title:
エレクトレットコンデンサー
Document Type and Number:
Japanese Patent JPWO2005086534
Kind Code:
A1
Abstract:
エレクトレット化されたシリコン酸化膜7を耐湿及び耐熱性を高めるためにシリコン窒化膜8および9で覆い振動電極5上に載置して形成した振動膜30と、固定電極6とを有するエレクトレットコンデンサーマイクロフォンユニット2。
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Inventors:
Hiroshi Ogura
Toru Yamaoka
Toru Yamaoka
Application Number:
JP2006510648A
Publication Date:
August 09, 2007
Filing Date:
February 24, 2005
Export Citation:
Assignee:
Matsushita Electric Industrial Co., Ltd
International Classes:
H04R19/01; B81B3/00; H01G7/02
Attorney, Agent or Firm:
Hiroshi Maeda
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura
Hiroshi Takeuchi
Takahisa Shimada
Yuji Takeuchi
Katsumi Imae
Atsushi Fujita
Kazunari Ninomiya
Tomoo Harada
Iseki Katsumori
Seki Kei
Yasuya Sugiura
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