Title:
ELECTRET DEVICE AND ELECTROSTATIC OPERATING APPARATUS
Document Type and Number:
Japanese Patent JP2008141171
Kind Code:
A
Abstract:
To provide an electret device capable of increasing the surface potential of an electret film composed of a silicon oxide film.
An electret device 10 includes a silicon substrate 1 having a groove 1b on the main surface 1a thereof and an electret film 2 composed of a silicon oxide film so formed on the main surface 1a of the silicon substrate 1 as to cover the inner surface of the groove 1b.
Inventors:
MABUCHI KATSUJI
Application Number:
JP2007268195A
Publication Date:
June 19, 2008
Filing Date:
October 15, 2007
Export Citation:
Assignee:
SANYO ELECTRIC CO
International Classes:
H01G7/02
Domestic Patent References:
| JPH0714490A | 1995-01-17 | |||
| JPH0252599A | 1990-02-22 | |||
| JP2008021787A | 2008-01-31 | |||
| JPH11219852A | 1999-08-10 | |||
| JP2002102625A | 2002-04-09 | |||
| JPH11117172A | 1999-04-27 | |||
| JPS5858719A | 1983-04-07 | |||
| JP2007062361A | 2007-03-15 |
Attorney, Agent or Firm:
Hirokazu Miyazono
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