Title:
ELECTRET SENSOR ELEMENTS, MATRIX SENSOR, MANUFACTURING METHODS THEREOF, AND MATRIX SENSOR CIRCUIT
Document Type and Number:
Japanese Patent JP2017118240
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide electret sensor elements which are capable of realizing thinning and downsizing through a simple process and may also be easily made into a matrix, a matrix sensor and manufacturing methods thereof.SOLUTION: The present invention relates to an electret sensor element configured to convert a vibration into an electric signal and comprises: a vibration electrode which includes a flat vibration surface under no load; a stationary electrode which is formed on a substrate; an insulation layer consisting of an air gap that is disposed between the vibration electrode and the stationary electrode, and an electret layer in which electric charge is stored, and insulated from the vibration electrode and the stationary electrode; and a thin film transistor for impedance transformation that is formed on the same surface as the stationary electrode.SELECTED DRAWING: Figure 1
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Inventors:
HIRAKI KATSUYOSHI
Application Number:
JP2015249726A
Publication Date:
June 29, 2017
Filing Date:
December 22, 2015
Export Citation:
Assignee:
LG DISPLAY CO LTD
International Classes:
H04R19/01; H04R1/02; H04R3/00; H04R19/00; H04R31/00
Domestic Patent References:
| JPH07162982A | 1995-06-23 | |||
| JPS61164399A | 1986-07-25 | |||
| JP2007267273A | 2007-10-11 | |||
| JP2009017337A | 2009-01-22 |
Foreign References:
| WO2001082649A1 | 2001-11-01 |
Attorney, Agent or Firm:
Michiharu Soga
Kajinami order
Shunichi Ueda
Junichiro Yoshida
Yoshikazu Takei
Yoshiyuki Tamura
Takahiro Matsuoka
Shuji Moizumi
Bessho Kobo
Kajinami order
Shunichi Ueda
Junichiro Yoshida
Yoshikazu Takei
Yoshiyuki Tamura
Takahiro Matsuoka
Shuji Moizumi
Bessho Kobo