Title:
Electric capacity type pressure sensor
Document Type and Number:
Japanese Patent JP6154760
Kind Code:
B2
More Like This:
| JP3260721 | DIAPHRAGM VACUUM GAUGE |
| WO/2014/085611 | MEMS PRESSURE SENSOR ASSEMBLY WITH ELECTROMAGNETIC SHIELD |
| JPH10148593 | PRESSURE SENSOR AND CAPACITANCE-TYPE PRESSURE SENSOR CHIP |
Inventors:
Tochigi Takenobu
Application Number:
JP2014023060A
Publication Date:
June 28, 2017
Filing Date:
February 10, 2014
Export Citation:
Assignee:
Azbil Co., Ltd.
International Classes:
G01L9/12; G01L19/14
Domestic Patent References:
| JP2009133838A | ||||
| JP2006085907A | ||||
| JP2008541049A | ||||
| JP2013050400A |
Foreign References:
| US20120197554 |
Attorney, Agent or Firm:
Masaki Yamakawa
Shigeki Yamakawa
Shigeki Yamakawa