Title:
静電容量型真空センサ
Document Type and Number:
Japanese Patent JP4437336
Kind Code:
B2
Inventors:
Miyashita jizo
Application Number:
JP13413699A
Publication Date:
March 24, 2010
Filing Date:
May 14, 1999
Export Citation:
Assignee:
Canon ANELVA Corporation
International Classes:
G01L21/00
Domestic Patent References:
| JP63032333A | ||||
| JP4106442A | ||||
| JP5231975A | ||||
| JP9126920A | ||||
| JP4095740A | ||||
| JP2196938A | ||||
| JP62182636A | ||||
| JP9043079A | ||||
| JP9210826A |
Attorney, Agent or Firm:
Iwata Today sentence