Title:
ELECTRIC CHARACTERISTIC EVALUATION DEVICE
Document Type and Number:
Japanese Patent JP2018018889
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an electric characteristic evaluation device capable of evaluating the electric characteristic of a ferroelectric or a pyroelectric before formation of upper electrode, without touching the ferroelectric or pyroelectric.SOLUTION: An electric characteristic evaluation device for evaluating the electric characteristic of a ferroelectric or pyroelectric (thin film material 13) formed on a substrate 11, has temperature variable means (23) for varying the temperature of the substrate 11 to vary the temperature of the thin film material 13, temperature measurement means (22) for measuring the temperature of the thin film material 13 in non-contact, and surface potential measurement means (21) for measuring the surface potential of the thin film material 13 in non-contact. The electric characteristic evaluation device varies the temperature of the thin film material 13, and evaluates the electric characteristic of the thin film material 13, from temperature variation of the thin film material 13 and variation of the surface potential.SELECTED DRAWING: Figure 1
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Inventors:
UJIMOTO KATSUYA
Application Number:
JP2016146406A
Publication Date:
February 01, 2018
Filing Date:
July 26, 2016
Export Citation:
Assignee:
RICOH CO LTD
International Classes:
H01L21/66; G01N25/00; H01L41/22
Attorney, Agent or Firm:
Chieko Tateno
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