To provide an electric component with a functional element capable of preventing the reliability from being degraded.
An electric component includes a substrate, a first insulating film for forming a cavity storing a functional element along with the substrate and having a plurality of through holes, and a second insulating film formed on a first film while closing an upper surface of the plurality of through holes. When a through hole positioned in an outermost periphery among a plurality of through holes is viewed from the above of the first film, an angle formed by the side surface of the first film defining the through hole at the position being the nearest from a center of an area forming the cavity at a lower part among the first films with the bottom surface of the first film is larger than 75° and is smaller than 90°.
Takakura Shigeo
Satoshi Kono
Makoto Nakamura
Yoshihiro Fukuhara
Takashi Mine
Toshio Shirane
Sadao Muramatsu
Nobuhisa Nogawa
Kocho Chojiro
Naoki Kono
Katsu Sunagawa
Morisezo Iseki
Takao Ako
Tadashi Inoue
Tatsushi Sato
Takashi Okada
Mihoko Horiuchi
Takenori Masanori