ELECTRIC CONDUCTIVE FILM AND ITS PRODUCTION

Title:

ELECTRIC CONDUCTIVE FILM AND ITS PRODUCTION

Document Type and Number:

Japanese Patent JP3194764

Kind Code:

B2

Abstract:

PURPOSE: To efficiently form an excellent electric conductive film over a large area.
CONSTITUTION: A glass substrate is coated with a coating soln. contg. a ruthenium compd. such as ruthenium chloride and at least one of compds. of Si, Zr, Ti and Al by spraying or spin coating and the coated substrate is heated to form an electric conductive film contg. ruthenium oxide.

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Inventors:

Go Morimoto
Kazuya Hiratsuka
Satoshi Takemiya
Keisuke Abe
Keiko Kubota
Hiroyuki Tomonaga

Application Number:

JP31337191A

Publication Date:

August 06, 2001

Filing Date:

November 01, 1991

Export Citation:

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Assignee:

Asahi Glass Co., Ltd.

International Classes:

C01G55/00; C03C4/14; C03C17/25; H01J9/20; H01J29/88; (IPC1-7): C03C17/25; C01G55/00; H01J29/88

Domestic Patent References:

JP3101101A
JP3177338A
JP3104101A
JP59195504A

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