Title:
ELECTRIC DISCHARGE PLASMA TREATING DEVICE
Document Type and Number:
Japanese Patent JP2705897
Kind Code:
B2
Abstract:
PURPOSE: To easily change a position where plasma is generate by a forming a magnetic neutral ray which is a position of the magnetic field zero existing continuously in a vacuum chamber and forming an electric field along this magnetic neutral ray, thereby generating the electric discharge plasma.
CONSTITUTION: The vacuum chamber 1 is composed of a cylindrical plasma generating chamber 2 consisting of an insulator and a substrate treating chamber 3. The outer side of this plasma generating chamber 2 is provided with electromagnetic coils 4, 5, 6 constituting magnetic field generating means. The same specified currents I4, I6 of the same direction are passed in the upper and lower electromagnetic coils 4, 6 and a current I5. of a reverse direction is passed in the intermediate electromagnetic coil 5. The anular magnetic neutral ray 7 which is the position of the magnetic field zero continuous on the inner side of the intermediate electromagnetic coil 5 is formed at the level of this coil. A high-frequency coil 8 which is an electric field generating means is wound concentrically on the outer side of the section of the electromagnetic coil 5 and a high-frequency electric field is applied along the magnetic neutral ray 7 to generate the strong electric field along the magnetic neutral ray 7. As a result, the position where the plasma is generated is easily displaced.
Inventors:
Uchida Taijiro
Application Number:
JP5241894A
Publication Date:
January 28, 1998
Filing Date:
March 24, 1994
Export Citation:
Assignee:
Nippon Vacuum Technology Co., Ltd.
International Classes:
H05H1/46; C23C16/44; C23C16/50; C23F4/00; H01L21/3065; (IPC1-7): C23F4/00; C23C16/44; C23C16/50; H01L21/3065; H05H1/46
Attorney, Agent or Firm:
Shigeru Yagita (3 outside)
Previous Patent: MANUFACTURE AND MANUFACTURING DEVICE OF SYNTHETIC LUMBER
Next Patent: WRAPPING FILM STORAGE BOX
Next Patent: WRAPPING FILM STORAGE BOX