Title:
ELECTRIC-FIELD ELECTRON EMISSION-TYPE SURGE ABSORBING ELEMENT AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP3131173
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electric-field electron emission-type surge absorbing element that allows its operating voltage to be set lower easily by devising constituents of a protective film covering emitter cones.
SOLUTION: In this surge absorbing element 10, a first substrate member 12 composed of an n-type semiconductor having an electron emitting part on which multiple emitter cones 20 are formed and a second substrate member 14 composed of an n-type semiconductor having a flat surface on which no emitter cone is formed are so arranged that a tip 20a of each emitter cone and the flat surface are placed to face to each other being separated from each other by a predetermined distance; the peripheries of both the substrate members 12, 14 are sealed airtightly interposing a frame 16 so as to form an enclosure 18, the inside of which is kept in a high vacuum condition; a first external electrode 24 and a second electrode 26 are formed on the outside surfaces of both the substrate members 12, 14, respectively. In this case, a protective film 22 composed of a diamond thin film is formed on the surfaces of the emitter cones 20.
Inventors:
Yoshito Kasai
Masayoshi Misawa
Yonekuboso
Masayoshi Misawa
Yonekuboso
Application Number:
JP20709397A
Publication Date:
January 31, 2001
Filing Date:
July 16, 1997
Export Citation:
Assignee:
Okaya Electric Industry Co., Ltd.
Nagano Prefecture
Nagano Prefecture
International Classes:
H01L21/314; H01T4/12; H02H7/20; H02H9/04; (IPC1-7): H01T4/12
Domestic Patent References:
| JP2278681A | ||||
| JP6260262A | ||||
| JP8264862A | ||||
| JP8212908A | ||||
| JP7320635A | ||||
| JP729483A | ||||
| JP5205617A | ||||
| JP8195165A |
Attorney, Agent or Firm:
Hiroyuki Okuda