Title:
ELECTRIC FIELD EMISSION TYPE COLD CATHODE
Document Type and Number:
Japanese Patent JP3436228
Kind Code:
B
Abstract:
PROBLEM TO BE SOLVED: To provide an electric field emission type cold cathode using a diamond film which is possible to make high electron emission in low electric field and operates stably for a long term.
SOLUTION: In an electric field emission type cold cathode, an electron emission part is made from a crystal diamond and a fine crystal diamond by a CVD method. Because the crystal diamond is an electron emission side and the fine crystal diamond functions as electron carriage path from a lower electrode to a surface, high electron emission is possible. Also, since the whole electron emission side is made from diamond, it is chemically stabilized and since the surface condition is varied, it is stably operated for a long term. Further, the electron emission side is made by the CVD method, thus carbide is formed between the lower electrode and the electron emission side. As a result, the electric contact can be obtained and it is possible to operate in low electric field.
Inventors:
Yamamoto, Hirochika
Baba, Kazuhiro
Baba, Kazuhiro
Application Number:
JP2000000012017
Publication Date:
June 06, 2003
Filing Date:
January 20, 2000
Export Citation:
Assignee:
NEC CORP
International Classes:
H01J29/04; H01J1/304; H01J9/02; H01J31/12; H01J29/04; H01J1/30; H01J9/02; H01J31/12; (IPC1-7): H01J1/304; H01J29/04; H01J31/12