To provide a manufacturing method for an electric-field-emission-type element that can improve vacuum degree in a flat panel display and prevent adsorption of molecules to an emitter surface.
This manufacturing method includes a process for forming a getter material 20d and a gate electrode 22a on surfaces of substrates 20a, 20b, a process for forming holes in the gate electrode and the getter material by etching, using a resist pattern as a mask, a process for leaving a side spacer 24a on the side wall of the hole in the getter material by forming a first sacrificial film on the substrate and etching back, a process for forming a second sacrificial film 26 on the substrate and forming a conductive emitter electrode 27 on it, and a process for exposing the emitter electrode by removing at least part of the second sacrificial film.