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Patent Searching and Data


Title:
ELECTRIC FIELD EMISSION TYPE VACUUM GAUGE
Document Type and Number:
Japanese Patent JPH0521037
Kind Code:
A
Abstract:

PURPOSE: To provide a vacuum gauge capable of utilizing an ultra-high vacuum or extreme-high vacuum and having simple structure.

CONSTITUTION: A needlelike cathode 3 having a tip curvature radius of 1μm or less and an anode 2 opposite to the needlelike cathode 3, are provided in an electrode chamber 1a connected to a vacuum chamber 1 in an ultra-high vacuum or extreme-high vacuum, and the + side of an outside constant-voltage power supply is connected to the anode 2 and the -side is linked to the needlelike cathode 3 via an ammeter 5. The radiation current of the needlelike cathode 3 detected by the ammeter 5 is differentiated with a differentiation circuit 6, and then displayed on a display 7.


Inventors:
IWATA TATSUO
Application Number:
JP17245791A
Publication Date:
January 29, 1993
Filing Date:
July 12, 1991
Export Citation:
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Assignee:
UNIV TOKAI
International Classes:
G01L21/00; H01J41/02; (IPC1-7): G01L21/00; H01J41/02
Attorney, Agent or Firm:
Ishido