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Title:
ELECTRIC INSULATING MATERIAL, INTER-LAYER INSULATIVE FILM, AND FORMING METHOD FOR THE FILM
Document Type and Number:
Japanese Patent JPH08321217
Kind Code:
A
Abstract:

PURPOSE: To provide an electric insulating material having a high heat resistance and low dielectric constant and also an inter-layer insulative film and to provide a method for forming the inter-layer insulative film.

CONSTITUTION: An electric insulating material chiefly contains at least one of the no-metal phthalocyanine or silicon phthalocyanine of such a structure that at least one of the hydrogen atoms bonded with an aromatic ring in the molecule is substituted with fluorine atom and the non-metal naphthalocyanine or silicon naphthalocyanine of such a structure that at least one of the hydrogen atoms bonded with the aromatic ring in the molecule is substituted with fluorine atom. An inter-layer insulative film is made from this insulating material, and a method for forming it consists of subjecting the insulating material to a plasma polymerization process.


Inventors:
TO YOICHI
Application Number:
JP1995000127656
Publication Date:
December 03, 1996
Filing Date:
May 26, 1995
Export Citation:
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Assignee:
SONY CORP
International Classes:
C08L83/00; C07D487/22; C07F7/10; C08L83/02; H01B3/24; H01B17/56; H01L21/31; H01L21/312; (IPC1-7): H01B3/24; C08L83/00; H01L21/31
Attorney, Agent or Firm:
船橋 國則