Title:
加工装置に電力及び不活性ガスを供給可能な電力及びガス供給システム
Document Type and Number:
Japanese Patent JP6379341
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide a power generating device capable of realizing a high temperature environment and a favorable inert gas atmosphere required for processing while suppressing the running cost of the device.SOLUTION: The power generation device is a device that supplies inert gas and electric power to a processing device that heats an object to be heated with electric power in an inert gas atmosphere and performs processing, and comprises: a power generating unit including a fuel cell that generates electric power using the supplied fuel and gas containing oxygen and discharges the exhaust gas; and an exhaust gas converting section for converting at least a part of the exhaust gas into an inert gas usable in the processing apparatus. Here, it is also preferable that the fuel cell generates electric power at least using a solid oxide fuel cell (SOFC) system or a solid polymer fuel cell (PEFC) system. It is also preferable that the exhaust gas converting unit includes a deoxidizing unit that removes or reduces oxygen content from the exhaust gas discharged from the fuel cell.SELECTED DRAWING: Figure 1
Inventors:
Katsumichi Tagami
Soichi Hashiba
Soichi Hashiba
Application Number:
JP2016234742A
Publication Date:
August 29, 2018
Filing Date:
December 02, 2016
Export Citation:
Assignee:
Micro Control Systems Co., Ltd.
International Classes:
H01M8/0662; B23K1/008; B23K3/04; B23K31/02; H01M8/00; H01M8/10; H01M8/12; H05K3/34
Domestic Patent References:
| JP2006136823A | ||||
| JP6203865A | ||||
| JP2008042070A |
Foreign References:
| US20090226778 |
Attorney, Agent or Firm:
Tomihiko Tatsumi