Title:
電源装置
Document Type and Number:
Japanese Patent JP4697460
Kind Code:
B2
Abstract:
The apparatus (1) has a control unit (9) to control anodic voltage applied to an anodic electrode (12), gas flow rate and magnetic flux density at ion output based on a section of the ion output, length of an ion acceleration region of an ion accelerator and a magnetic flux polarization ratio for satisfying a specific formula. The polarization ratio represents a ratio of the magnetic flux density and average value of the flux density in an ion acceleration direction. The magnetic flux density depends on current of internal and external coils (13, 14).
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Inventors:
Taichiro Minden
Takashi Nakagawa
Ikuo Suga
Hiroyuki Osuka
Toshiyuki Ozaki
Takashi Nakagawa
Ikuo Suga
Hiroyuki Osuka
Toshiyuki Ozaki
Application Number:
JP2006272858A
Publication Date:
June 08, 2011
Filing Date:
October 04, 2006
Export Citation:
Assignee:
Mitsubishi Electric Corporation
International Classes:
F03H1/00; H05H1/54
Domestic Patent References:
| JP2006125236A | ||||
| JP2005507555A | ||||
| JP2005282403A | ||||
| JP2004531038A | ||||
| JP2004084487A |
Attorney, Agent or Firm:
Shogo Takahashi
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka
Tadahiko Inaba
Kanako Murakami
Nakatsuru Kazutaka