To manufacture a resistor that is insensitive to an external mechanical load which is suitable for such a sensor, but quickly fluctuating temperature by firmly coupling a conducting path with a substrate on two separated pedestals.
An electric resistor is formed in such a way that fixing agent areas 3 and 4 are separately stuck to the electrically insulating surface of a ceramic substrate 1. Then a pedestal material 5 is suck to the areas 3 and 4 and firmly coupled with the substrate 1 through the areas 3 and by baking the material 5. A film 8 is selectively formed on the external surface of the material 5 and a platinum layer 10 which becomes a conducting path later is formed on the film 8. In addition, a passive layer 11 is selectively formed on the platinum layer 10. Successively, pedestals 16 and 17 are separately formed on the areas 3 and 4 in two etching steps. Therefore, the resistor is suitable for such a sensor that is insensitive to an external mechanical load, but quickly fluctuating temperature.
| JP2000277302 | CERAMIC ELEMENT UNIT AND MANUFACTURE THEREOF |
| JP2020191343 | THERMISTOR ELEMENT AND MANUFACTURING METHOD THEREOF |
ULLRICH KARLHEINZ
SANDER MARGIT
DIETMANN STEFAN
