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Title:
ELECTRIC STIMULATION CIRCUIT FOR PULSE GAS LASER
Document Type and Number:
Japanese Patent JP2002050814
Kind Code:
A
Abstract:

To provide an electric stimulation circuit for pulse gas lasers for generating a high-speed laser pulse with stable energy in a fluorine excimer laser and a fluorine molecular laser.

The laser tube is provided with a number of electrodes including a pair of main discharge electrodes connected to a discharge circuit for generating the output laser beam by stimulating a laser gas. The discharge circuit is provided with a solid-state switch. The solid-state switch is provided with a number of solid-state devices for switching the voltage at least exceeding 12 kV or a voltage required for switching the laser. A series of switches have a rise time of less than approximately 300 ns, the time is preferably approximately 100 ns or less.


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Inventors:
OSMANOW RUSTEM
STAMM UWE
TARGSDORG ANDREAS
Application Number:
JP2001144873A
Publication Date:
February 15, 2002
Filing Date:
May 15, 2001
Export Citation:
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Assignee:
LAMBDA PHYSIK AG
International Classes:
H01S3/097; H01S3/225; H01S3/08; H01S3/0975; H01S3/098; (IPC1-7): H01S3/097; H01S3/225
Domestic Patent References:
JPH053358A1993-01-08
JPH05136503A1993-06-01
JP2001044542A2001-02-16
JP2001267666A2001-09-28
Attorney, Agent or Firm:
Sugimura Kosaku (1 person outside)



 
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