Title:
電気接続システム、およびリソグラフィ装置
Document Type and Number:
Japanese Patent JP5839865
Kind Code:
B2
Abstract:
An electrical connector comprises a high voltage pad and a high voltage plate. When connected to another electrical connector, the two plates, which are at the same voltage as the pads, form a region of high voltage in which the field is low. The pads are positioned in that region. An electrostatic clamp of an EUV lithographic apparatus may have such a pad and plate, for connecting to the electrical connector. By placing the interconnection in a low field region, triple points (points of contact between a conductor, a solid insulator and a gas) may be present in that region.
Inventors:
Hilbers, Alexander, Petrus
Van der Wilk, Ronald
Van der Wilk, Ronald
Application Number:
JP2011153598A
Publication Date:
January 06, 2016
Filing Date:
July 12, 2011
Export Citation:
Assignee:
AS M Netherlands B.V.
International Classes:
G03F7/20
Domestic Patent References:
| JP2008211240A |
Foreign References:
| WO2007072817A1 | ||||
| WO2009101869A1 |
Attorney, Agent or Firm:
Yoshiyuki Inaba
Toshifumi Onuki
Toshifumi Onuki