Title:
電気特性評価装置
Document Type and Number:
Japanese Patent JP4526626
Kind Code:
B2
Abstract:
An apparatus is provided for evaluating electrical characteristics by bringing a plurality of metal probes in contact with a minute area with low contact resistance. A metal probe (8) is formed on the free end of a cantilever (6) on which are formed a resistor (5), two electrodes (1, 2) for resistance detection, and an electrode (7) for measuring electrical characteristics. The tip of the metal probe (8) projects beyond the free end of the cantilever (6). This configuration enables a plurality of probes to come into contact with an area of about 10 nm size. The probe position is controlled by an atomic force microscopy to achieve low contact resistance.
Inventors:
Go Hasegawa
Masakazu Aono
Tomonobu Nakayama
Taichi Okuda
Kazuya Terabe
Hirofumi Tanaka
Masakazu Aono
Tomonobu Nakayama
Taichi Okuda
Kazuya Terabe
Hirofumi Tanaka
Application Number:
JP36027499A
Publication Date:
August 18, 2010
Filing Date:
December 20, 1999
Export Citation:
Assignee:
Japan Science and Technology Agency
RIKEN
RIKEN
International Classes:
G01B21/30; G01R27/02; B81B3/00; G01N27/00; G01N27/04; G01N27/07; G01N27/20; G01Q30/02; G01Q60/38; G01Q60/40; G01Q70/00; G01R1/06; G01R31/28; H01L21/66; G01R1/067
Domestic Patent References:
| JP9326425A | ||||
| JP9026436A | ||||
| JP6123621A | ||||
| JP11326348A | ||||
| JP10038916A | ||||
| JP7113634A | ||||
| JP5018740A | ||||
| JP8005643A | ||||
| JP9127139A | ||||
| JP3071001A |
Other References:
青野正和、姜春生、中山知信、奥田太一、喬山、櫻井亮、カーステン ティアストループ、呉章華,“ナノスケールの物性や機能をどう測るか -ナノ構造の「構築」から「計測」へ-”,応用物理,日本,応用物理学会,1998年12月10日,Vol.67,No.12,pp.1361-1369
Attorney, Agent or Firm:
Mamoru Shimizu