PURPOSE: To enable the making of smaller and lighter sensors and actuators with a novel structure by providing a working part with a part adapted to be displaced parallel.
CONSTITUTION: A strip-shaped working part 2 is mounted on a frame part 1 having an opening 3 and both ends of the working part 2 are fixed on a frame 2 to make fixed parts 6. The working part 2 has electrode layers 5a and 5b formed on both upper and lower surfaces of a strain gauge layer 4. When an electrical signal is applied between the electrode layers 5a and 5b, an elongated lateral distortion is generated in the strain gauge layer 4 and hence, the working part 2 with both ends thereof fixed is buckled and displaced across the thickness thereof. By the contrary, when an external force acts on the working part 2, an electrical signal is generated in the strain gauge layer 4.
IKEDA MASAAKI
GOTO HIROSHI
WAKABAYASHI SHUICHI
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