Title:
ELECTRICALLY CONDUCTIVE OXIDE AND ELECTRODE USING THE SAME
Document Type and Number:
Japanese Patent JP3644647
Kind Code:
B2
Abstract:
PURPOSE: To obtain a novel material and electrode having optical absorption edge shorter than 400nm, capable of giving a film trensperent independently on the thickness and having excellent electric conductivity.
CONSTITUTION: This electrically conductive oxide is expressed by the formula ZnxMyInzO(x+3y/2+3z/2)-d (in the formula, M expresses at least one element of Al and Ca, the ratio (x:y) is >1.8:1 to ≤8:1, the ratio (z:y) is (0.4:1) to (1.4:1) and the quantity of oxygen defect is >0 to (x+3y/2+3z/2)×10-1). A part of at least one kind of element of Zn, M and In in the electrically conductive oxide expressed by the formula is replaced by other element, and the element replacing Zn is ≥2-valent and the element replacing M and In is ≥3-valent. A cation is implanted to the oxide expressed by the formula in which, the lower limit of (d) is 0.
Inventors:
Masahiro Orita
Hiroyuki Sakai
Takeuchi Megumi
Hiroaki Tanji
Hiroyuki Sakai
Takeuchi Megumi
Hiroaki Tanji
Application Number:
JP10132195A
Publication Date:
May 11, 2005
Filing Date:
April 25, 1995
Export Citation:
Assignee:
HOYA CORPORATION
International Classes:
G02F1/1343; C01G15/00; C04B35/453; C23C14/08; C23C14/24; C23C14/32; C23C14/34; C23C14/48; G09F9/30; H01B1/08; (IPC1-7): C01G15/00; C04B35/453; C23C14/08; G02F1/1343; H01B1/08
Domestic Patent References:
| JP6290641A | ||||
| JP6318406A | ||||
| JP6236711A | ||||
| JP6234522A |
Attorney, Agent or Firm:
Patent Service Corporation Patent Office Sykes
Toshio Shiozawa
Masazumi Imamura
Toshio Shiozawa
Masazumi Imamura
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