Title:
ELECTROACOUSTIC INTEGRATED CIRCUIT AND ITS MANUFACTURE
Document Type and Number:
Japanese Patent JP2574612
Kind Code:
B2
Abstract:
PURPOSE: To obtain a small, lightweight electroacoustic integrated circuit of high performance by directly sticking an electroacoustic element having excellent electroacoustic characteristics to a III-V compound semiconductor substrate provided with electronic elements.
CONSTITUTION: A surface acoustic wave resonator 2 composed of a single-crystal piezoelectric quartz substrate is directly stuck to a GaAs substrate 1 made of a III-V compound semiconductor. Then a transistor 3, variable capacitance diode chip 4, passive chip parts 5 such as capacitor, inductor and resistor, and the electrode 6 of the resonator 2 are formed on the substrate 1. The oscillation frequency of the resonator 2 can be changed when the capacitance of the chip 4 is changed by changing the voltage applied across the chip 4. The quartz substrate 2 is directly stuck to the substrate 1. Therefore, a very small voltage- controlled oscillator can be obtained when the integrally united substrates 1 and 2 are housed in a sealed container.
Inventors:
EDA KAZUO
TAGUCHI YUTAKA
KANAHOSHI AKIHIRO
OGURA TETSUYOSHI
TAGUCHI YUTAKA
KANAHOSHI AKIHIRO
OGURA TETSUYOSHI
Application Number:
JP27400392A
Publication Date:
January 22, 1997
Filing Date:
October 13, 1992
Export Citation:
Assignee:
MATSUSHITA ELECTRIC IND CO LTD
International Classes:
H01L27/02; H01L21/02; H01L27/00; H01L41/08; H01L41/22; H03B5/32; H03F3/195; H03H9/25; H04R17/00; (IPC1-7): H01L27/00; H01L21/02; H01L41/08; H01L41/22; H03B5/32; H03F3/195; H03H9/25; H04R17/00
Domestic Patent References:
| JP61183915A | ||||
| JP5679487A | ||||
| JP55109021A | ||||
| JP4283957A |
Attorney, Agent or Firm:
Tomoyuki Takimoto
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