To provide an electrocasting mold manufactured by a photolithography method superior in a form and size, etc. of an opening part where an electrocast body is formed.
The electrocasting mold 1 includes a substrate 40 and a photoresist layer 5 formed on the surface of the substrate 40. The substrate 40 is formed of an ultraviolet absorbing layer 3 at least whose surface absorbs ultraviolet rays. The photoresist layer 5 has the opening part 6, and formed from an edge of the substrate 40 to the inside of the opening part 6 of the photoresist layer 5 between the surface of the substrate 40 and the surface on the surface side of the substrate 40 of the photoresist layer 5. Further, a conductive film 4 having permeability to the ultraviolet rays and conductivity is formed.
SATO MIE
NIWA TAKASHI
JPS6263698A | 1987-03-20 | |||
JP2007501951A | 2007-02-01 | |||
JPS63236032A | 1988-09-30 | |||
JPS619592A | 1986-01-17 |
Noriaki Uchino
Nobuyuki Kimura
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