PURPOSE: To provide an electrochemical gas sensor and a method of manufacture of the same, whose sensitivity is stable against secular change, by forming a solid electrolyte film which is free from exfoliation of or crack initiation in the solid electrolyte film and which is equipped with a surface having ion conductivity holding effect.
CONSTITUTION: An electrochemical gas sensor concerned is equipped with a bunch 8 of electrodes installed on an insulative base board 1 and a solid electrolyte film 9 which covers this electrode bunch 8 in continuity, wherein the solid electrolyte film 9 consists in a gradient film in which the fluorine content is substantially incremental over the surfaces from the electrode bunch 8 to the solid electrolyte film 9. The solid electrolyte film 9 is plasma polymerized according to the rate at which fluoric monomers A are gradually incremental relative to monomers B having functional group giving ion conductivity from the electrode bunch 8.
HATAI TAKASHI
KUSANAGI SHIGEKAZU
