Title:
電極内蔵体及びこれを用いたウエハ支持部材
Document Type and Number:
Japanese Patent JP4548928
Kind Code:
B2
Inventors:
Tsunehiko Nakamura
Application Number:
JP2000333837A
Publication Date:
September 22, 2010
Filing Date:
October 31, 2000
Export Citation:
Assignee:
Kyocera Corporation
International Classes:
C23C14/50; H01L21/683; C23C16/458; H01L21/68
Domestic Patent References:
| JP2000332091A | ||||
| JP2000236000A | ||||
| JP5206254A | ||||
| JP5102289A | ||||
| JP10189696A | ||||
| JP11233602A | ||||
| JP61152497A | ||||
| JP11251416A |