Title:
ELECTRODE BUILT-IN PLATE AND ELECTROSTATIC CHUCK
Document Type and Number:
Japanese Patent JP2015142100
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide an electrode built-in plate which can suction a suctioned object to hold the object while withstanding application of high voltage and a process environment and makes contamination less likely to be caused by a corrosive gas or under a plasma environment, and to provide an electrostatic chuck formed by the electrode built-in plate.SOLUTION: An electrode built-in plate includes: a base substance 1 made of ceramic, is formed into an integral form, and includes an electrode region 1s and an opening part 3 connected with the electrode region 1s and the exterior; and an electrode 2. The electrode 2 is made of silver or copper, is positioned in the electrode region 1s, and has a thickness of 50 μm or thicker.
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Inventors:
MUNEISHI TAKESHI
TODA HAJIME
TODA HAJIME
Application Number:
JP2014015702A
Publication Date:
August 03, 2015
Filing Date:
January 30, 2014
Export Citation:
Assignee:
KYOCERA CORP
International Classes:
H01L21/683; H02N13/00
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