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Patent Searching and Data


Title:
ELECTRODE FILM FORMING DEVICE
Document Type and Number:
Japanese Patent JPH09241845
Kind Code:
A
Abstract:

To exactly form an electrode film on a vibrating reed by stabilizing the vibration frequency output of a monitor quartz crystal.

The monitor quartz crystal 30 and oscillator 27 of the device for forming the electrode film on the vibrating reed in a vacuum chamber 21 are arranged within the same housing implement by shortening the distance from the monitor quartz crystal 30 to the oscillator 27 in order to oscillate the monitor quartz crystal 30 by the oscillator 27 in the vacuum chamber 21 and decrease the floating capacitance between the monitor quartz crystal 30 and the oscillator 27. The attenuation in output signals is made up by arranging an amplifier 50 behind the output signals of the oscillator 27 for oscillation of the monitor quartz crystal.


Inventors:
MATSUI MASAHIRO
YANAGISAWA KATSUNORI
Application Number:
JP8059296A
Publication Date:
September 16, 1997
Filing Date:
March 08, 1996
Export Citation:
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Assignee:
MIYOTA KK
International Classes:
C23C14/54; H01L41/09; H01L41/22; H03H3/02; (IPC1-7): C23C14/54; H01L41/09; H01L41/22; H03H3/02