Title:
【発明の名称】金属粒子検出センサの電極構造
Document Type and Number:
Japanese Patent JP3094170
Kind Code:
B2
Abstract:
PCT No. PCT/JP92/00356 Sec. 371 Date Sep. 14, 1993 Sec. 102(e) Date Sep. 14, 1993 PCT Filed Mar. 24, 1992 PCT Pub. No. WO92/17772 PCT Pub. Date Oct. 15, 1992.An electrode structure of a metallic particle detecting sensor capable of detecting with high efficiency metal powders floating in a wide range in an oil tank. The electrode structure is formed by opposing, on a substrate, a pair of electrodes (1, 2), formed of thin film metals of such as Ta, W, Pt, Cr, Au or the like, having combed (toothed) structures with their respective teeth being meshed or interdigitated with each other.
More Like This:
Inventors:
Akira Mori
Ikuo Uchino
Atsuhiko Hirosawa
Kunihiro Yamazaki
Ikuo Uchino
Atsuhiko Hirosawa
Kunihiro Yamazaki
Application Number:
JP8583291A
Publication Date:
October 03, 2000
Filing Date:
March 27, 1991
Export Citation:
Assignee:
KOMATSU LTD.
International Classes:
G01V3/08; G01N15/02; G01N15/10; (IPC1-7): G01N15/02
Domestic Patent References:
| JP5942441A | ||||
| JP3282246A | ||||
| JP6068464U | ||||
| JP499799B1 |
Attorney, Agent or Firm:
Tadashi Hamamoto (1 person outside)