To provide an electrode structure of a piezoelectric element which can simplify the electrode forming step of the piezoelectric element and can drive forward or reversely with good balance, and to provide an electrode forming method, a piezoelectric actuator and an electronic apparatus.
The electrode structure of the piezoelectric element includes an oscillating object having the piezoelectric element 1 and a moving element operated upon pressure contact with the oscillating object. A plurality of common electrodes 12a, 12b, 12c, 12d, 12e and 12f of substantially the same shapes are provided on one surface of the piezoelectric element 1. A plurality of drive electrodes 11a, 11b, 11c, 11d, 11e, 11f, 11g, 11h, 11i, 11j, 11k and 11l of substantially the same shapes having shapes corresponding to the part of the shapes of the common electrodes 12a, 12b, 12c, 12d, 12d and 12f are provided on the other surface opposed to the one surface of the piezoelectric element 1.
AKIYAMA YUKIO
ITO HIRONOBU
KOSAKA TAKAYUKI
