Title:
ELECTRODE SYSTEM AND METHOD FOR EVALUATING ELECTROCHEMICAL STATE OF SOLUTION BY USING THE SAME
Document Type and Number:
Japanese Patent JP3924490
Kind Code:
B2
Abstract:
PROBLEM TO BE SOLVED: To provide an electrode system which can simply and accurately measure an electrochemical state of a solution to be measured without using a reference electrode containing a chlorine ion by forming the flow of a plating liquid and a current distribution in one-dimension and to provide a method for measuring the electrochemical state using the same.
SOLUTION: The electrode system comprises: an electrode holder having a sample electrode and the reference electrode; and an opposite electrode provided separately from the holder. The holder is formed of a non-conductive material having a cylindrical hole closed at one end. The sample electrode is provided at a bottom of the hole. The reference electrode is provided at an arbitrary position of the peripheral wall of the hole. The method for evaluating the electrochemical state of the solution comprises the steps of: maintaining a flowing direction of the ion between the sample electrode and the reference electrode constant; and measuring a potential between the sample electrode and the opposite electrode while comparing with the potential of the reference electrode.
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Inventors:
Keisuke Hayafusa
Hiroshi Yokota
Hiroshi Hachiho
Koji Mishima
Hiroshi Yokota
Hiroshi Hachiho
Koji Mishima
Application Number:
JP2002105130A
Publication Date:
June 06, 2007
Filing Date:
April 08, 2002
Export Citation:
Assignee:
Ebara Corporation
International Classes:
G01N27/48; G01N33/20; C25D17/10; C25D21/12; G01N27/30; G01N27/416; (IPC1-7): G01N27/48; C25D17/10; C25D21/12; G01N27/30; G01N27/416; G01N33/20
Domestic Patent References:
JP2001228115A | ||||
JP5106100A | ||||
JP2000193640A | ||||
JP2002020900A | ||||
JP2002098670A | ||||
JP10510917A |
Attorney, Agent or Firm:
Nobuo Ono
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